Question about cooking chicken breasts

I’m trying to do more batch cooking, but I’ve run into a problem with dried out chicken breasts. I put them in glass baking dishes (like 8x8 or bigger), put them in the oven at 350 to 375, and then cook until the chicken breasts are done and the innermost part of the breast is white and at least 165 degrees. Sometimes I’ll try to keep them moist by covering the dish with foil or adding some liquid to it, but the chicken breasts always come out dry. Does anyone have a solution for this? And can anyone suggest how to marinate the breasts for this? I’d love to be able to make chicken breasts in bulk that are nice and moist.